Servo System Air Bearing Stage Series
Air Bearing Stage Series
The double drive gantry stage has high rigidity, low friction, high positioning accuracy, and is suitable for situations with high precision requirements. The stage structure is simple, scalable, and customizable. The stage is based on marble, and each axis is equipped with precision grade guideway, and precision gratings to meet the high-precision requirements.
Features
Air Bearing Direct Drive
The air elastic potential energy is used as the support guide rail to achieve zero friction between the slide rail and the slide table and reduce the error
High Positioning Accuracy
Excellent dynamic performance, positioning accuracy, speed stability and high resolution
Customized Requirements
Be customized according to customer needs
Applications
Widely used in large optical lens inspection, wafer defect detection in semiconductor field, precision manufacturing and packaging, measurement and inspection, biological sample processing