Servo System Lifting Stage Series
Lifting Stage Series
The vertical motion Z-platform with nanoscale positioning accuracy has excellent dynamic performance and positioning accuracy. High-reliability drive mechanism for longer service life. Larger trips can be customized.
Features
High-Precision Positioning
With very excellent dynamic performance, positioning accuracy, to provide customers with Z-direction precision positioning
Stable Load
With power off lock function to prevent heavy objects from falling
Customized Requirements
It can be evaluated and customized according to customer needs
Applications
Widely used in Photolithography, inspection and packaging in the semiconductor field, contour measurement, gene sequencing in the biomedical field, optical lens inspection and precision machine